2-D mechanical beam steering antenna fabricated using MEMS technology

A mechanical beam steering antenna capable of beam steering with two degrees of freedom is proposed and fabricated using MEMS technology. The V-band antenna element is implemented on the polymer platform which is capable of rotation with two degrees of freedom so that the beam can be directed to any desired direction. Radiation pattern of the fabricated antenna was measured and was in good agreement with the simulation results.

[1]  Jung-Chih Chiao,et al.  MEMS reconfigurable Vee antenna , 1999, 1999 IEEE MTT-S International Microwave Symposium Digest (Cat. No.99CH36282).

[2]  Robert J. Mailloux,et al.  Phased Array Antenna Handbook , 1993 .

[3]  M. Esashi,et al.  Silicon micromachined two-dimensional galvano optical scanner , 1994 .