Low loss, polarization insensitive SiON components

A low-loss (< 0.04 dB/cm, in the entire S-, C-, and L-bands), silicon-oxynitride (SiON) platform has been developed. Polarization insensitive directional couplers and compact, low loss (< 2 dB) AWGs with integrated spot-size converters have been fabricated.

[1]  C. Madsen.  Integrated waveguide allpass filter tunable dispersion compensators , 2002, Optical Fiber Communication Conference and Exhibit.

[2]  B. Little.  A VLSI photonics platform , 2003, OFC 2003 Optical Fiber Communications Conference, 2003..