Fabrication and characterization of a silicon cantilever probe with an integrated quartz-glass (fused-silica) tip for scanning near-field optical microscopy.

A cantilever-based probe is introduced for use in scanning near-field optical microscopy (SNOM) combined with scanning atomic-force microscopy (AFM). The probes consist of silicon cantilevers with integrated 25-mum-high fused-silica tips. The probes are batch fabricated by microfabrication technology. Transmission electron microscopy reveals that the transparent quartz tips are completely covered with an opaque aluminum layer before the SNOM measurement. Static and dynamic AFM imaging was performed. SNOM imaging in transmission mode of single fluorescent molecules shows an optical resolution better than 32 nm.

[1]  R. Toledo-Crow,et al.  Near‐field differential scanning optical microscope with atomic force regulation , 1992 .

[2]  Novotny,et al.  Light propagation in a cylindrical waveguide with a complex, metallic, dielectric function. , 1994, Physical review. E, Statistical physics, plasmas, fluids, and related interdisciplinary topics.

[3]  N. F. Hulst,et al.  Moulded photoplastic probes for near‐field optical applications , 2001, Journal of microscopy.

[4]  S. K. Murad,et al.  Generic scanned-probe microscope sensors by combined micromachining and electron-beam lithography , 1998 .

[5]  Lukas Novotny,et al.  Near-field optical imaging using metal tips illuminated by higher-order Hermite–Gaussian beams , 1998 .

[6]  M. Radmacher,et al.  Scanning nearfield optical microscope using microfabricated probes , 1994 .

[7]  E. Betzig,et al.  Combined shear force and near‐field scanning optical microscopy , 1992 .

[8]  W. Ehrfeld,et al.  Microfabrication of new sensors for scanning probe microscopy , 1998 .

[9]  M. Nieto-Vesperinas,et al.  THEORY FOR THE APERTURELESS NEAR-FIELD OPTICAL MICROSCOPE : IMAGE RESOLUTION , 1995 .

[10]  J. O'keefe,et al.  Resolving Power of Visible Light , 1956 .

[11]  E. Synge.  XXXVIII. A suggested method for extending microscopic resolution into the ultra-microscopic region , 1928 .

[12]  de Rooij NF,et al.  Microfabrication of a combined AFM-SNOM sensor , 2000, Ultramicroscopy.

[13]  K. Fukuzawa,et al.  Apertureless near-field optical microscopy with differential and close-proximity detection , 1997 .

[14]  T. D. Harris,et al.  Breaking the Diffraction Barrier: Optical Microscopy on a Nanometric Scale , 1991, Science.

[15]  N. F. van Hulst,et al.  Near-field optical microscope using a silicon-nitride probe , 1993 .

[16]  Micromachined SPM probes with sub‐100 nm features at tip apex , 1999 .

[17]  H. Gersen,et al.  Near-field fluorescence imaging with 32 nm resolution based on microfabricated cantilevered probes , 2000 .

[18]  Olivier J. F. Martin,et al.  Controlling and tuning strong optical field gradients at a local probe microscope tip apex , 1997 .

[19]  H. Fuchs,et al.  The tetrahedral tip as a probe for scanning near‐field optical microscopy at 30 nm resolution , 1994 .

[20]  W. Denk,et al.  Optical stethoscopy: Image recording with resolution λ/20 , 1984 .

[21]  A. Shah,et al.  Fast Deposition of a-Si:H Layers and Solar Cells in a Large-Area (40 x40 cm2) VHF-GD Reactor , 1999 .

[22]  E. Oesterschulze,et al.  Multipurpose sensor tips for scanning near-field microscopy , 1996 .

[23]  N. D. de Rooij,et al.  Near‐field optical microscopy based on microfabricated probes , 2001, Journal of microscopy.