论文信息 - Defect Reduction in Epitaxial 3C-SiC on Si(001) and Si(111) by Deep Substrate Patterning - 字舞流文

Defect Reduction in Epitaxial 3C-SiC on Si(001) and Si(111) by Deep Substrate Patterning

H. von Känel | T. Kreiliger | L. Miglio | F. Mancarella | F. La Via | N. Piluso | R. Anzalone | M. Mauceri | D. Crippa | Marco Puglisi