论文信息 - Characterization and Reduction of Defects in 4H-SiC Substrate and Homo-Epitaxial Wafer - 字舞流文

Characterization and Reduction of Defects in 4H-SiC Substrate and Homo-Epitaxial Wafer

M. Dudley | B. Raghothamachar | Yafei Liu | Tuerxun Ailihumaer | Long Yang | Huiwa Wu | Lili Zhao