Optimizing focused ion beam created solid immersion lenses in bulk silicon using design of experiments

Abstract In search of efficient solutions improving image resolution for backside failure analysis, the creation of solid immersion lenses in bulk silicon using focused ion beam has been investigated deeply in parametric detail. This technique is optimized using design of experiments, providing a better understanding of the pure ion beam sputtering process. It produces SILs in less than 20 min of processing time and offers an additional magnification of 3.2×. The optimal setup of this FIB created SIL is demonstrated and provides an improvement in resolution by a factor of 1.8. Limits of this technique are encountered and analyzed for future development.

[1]  Terry Speed.  Statistics for Experimenters: Design, Innovation, and Discovery (2nd ed.) , 2006 .

[2]  Frank Altmann,et al.  Lock-in thermal IR imaging using a solid immersion lens , 2006, Microelectron. Reliab..

[3]  Y. Mashiko,et al.  High resolution backside fault isolation technique using directly forming Si substrate into solid immersion lens , 2003, 2003 IEEE International Reliability Physics Symposium Proceedings, 2003. 41st Annual..

[4]  Joseph G. Pigeon,et al.  Statistics for Experimenters: Design, Innovation and Discovery , 2006, Technometrics.

[5]  B. Goldberg,et al.  High resolution subsurface microscopy technique , 2000, LEOS 2000. 2000 IEEE Annual Meeting Conference Proceedings. 13th Annual Meeting. IEEE Lasers and Electro-Optics Society 2000 Annual Meeting (Cat. No.00CH37080).

[6]  임천석.  Modern Optical Engineering: 3rd ed. (저자 : Warren J. Smith) , 2007 .

[7]  Jiju Antony,et al.  Design of experiments for engineers and scientists , 2003 .

[8]  M. Goossens,et al.  Diffractive lenses for high resolution laser based failure analysis , 2006, 2006 13th International Symposium on the Physical and Failure Analysis of Integrated Circuits.