论文信息 - Characterization of the Thin Diamond-Like Carbon Films Deposited Using Rf Inductively Coupled Ch4- Plasma Source - 字舞流文

Characterization of the Thin Diamond-Like Carbon Films Deposited Using Rf Inductively Coupled Ch4- Plasma Source

A. Khomich | B. Druz | A. Rukovishnikov | N. M. Rossukanyi | V. Polyakov | E. Ostan | A. Hayes