论文信息 - Defect formation in implantation of crystalline Si by MeV Si ions - 字舞流文

Defect formation in implantation of crystalline Si by MeV Si ions

A. Vehanen | J. Keinonen | M. Hautala | P. Hautojärvi | E. Rauhala | E. Punkka | J. Mäkinen