Reciprocated lifting device

The present invention provides a reciprocating lifting apparatus mounted on a chamber having a vacuum chamber, comprising a support plate, the mounting plate, the drive, the lift lever and adjusting member and a plurality of bellows-one correspondence. The support plate is positioned outside the chamber and is parallel to the base plate, the mounting plate is located below the cavity and the support plate is fixedly connected to the base of the cavity. Lifting rod are fixed on the lower end of the support plate, the upper end extending into the vacuum chamber showed a seal and forms a support surface carrying a workpiece. Card regulating member support plate and the upper end is rotationally connected together, with the lower end of the output shaft of the drive socket as a screw connection, the mounting plate of the drive. Socket and the upper end of the bellows body and said sealed chamber connected to the lifting bar at the outer outside the chamber, and sealing the lower end of the support plate is connected, the drive reciprocates linearly adjusting member by the drive support plate. Since the adjustment member and the bellows, so that the structure of the present invention is simple, low cost and can simultaneously trimming precision, but also has a longer life.