Low-loss lateral-extensional piezoelectric filters on ultrananocrystalline diamond

In this work, lateral-extensional thin-film piezoelectric- on-diamond (TPoD) filters with very low insertion loss (IL) values (<; 4 dB) are reported. Two different lateral-extensional modes of a resonant structure are coupled together to realize a two-pole filter. The filters of this work exhibit low IL values, with fractional bandwidth between 0.08% and 0.2%, and have a very small footprint. This paper reports on the lowest IL in the literature for lateral-extensional thin-film piezoelectric filters with 50 Ω terminations in the GSM frequency band (~900 MHz). The narrow-band filters of this work are fabricated on three ultrananocrystalline diamond substrates to achieve higher frequencies without excessive reduction in the feature size. The paper also thoroughly studies the parameters that affect the performance of such filters and then discussions are evaluated by the statistical data collected from the fabricated wafers.

[1]  J. Pulskamp,et al.  Fully-differential mechanically-coupled PZT-on-silicon filters , 2008, 2008 IEEE Ultrasonics Symposium.

[2]  Hongjun Zeng,et al.  High-Frequency Thin-Film AlN-on-Diamond Lateral–Extensional Resonators , 2013, Journal of Microelectromechanical Systems.

[3]  H.J. Whitehouse,et al.  SAW filters for Global Positioning Satellite (GPS) receivers , 2002, 2002 IEEE Position Location and Navigation Symposium (IEEE Cat. No.02CH37284).

[4]  Reza Abdolvand,et al.  Concurrent enhancement of Q and power handling in multi-tether high-order extensional resonators , 2010, 2010 IEEE MTT-S International Microwave Symposium.

[5]  M. Onoe,et al.  High Frequency Crystal Filters Employing Multiple Mode Resonators Vibrating In Trapped Energy Modes , 1966 .

[6]  Reza Abdolvand,et al.  Very low-loss high frequency lateral-mode resonators on polished ultrananocrystalline diamond , 2011, 2011 Joint Conference of the IEEE International Frequency Control and the European Frequency and Time Forum (FCS) Proceedings.

[7]  R. Smythe,et al.  A note on VHF acoustically coupled bandpass crystal filters , 1967 .

[8]  C. Campbell.  Applications of surface acoustic and shallow bulk acoustic wave devices , 1989, Proc. IEEE.

[9]  R. Abdolvand,et al.  Toward ultimate performance in GHZ MEMS resonators: Low impedance and high Q , 2010, 2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS).

[10]  Chengjie Zuo,et al.  12E-3 Channel-Select RF MEMS Filters Based on Self-Coupled AlN Contour-Mode Piezoelectric Resonators , 2007, 2007 IEEE Ultrasonics Symposium Proceedings.

[11]  Reza Abdolvand,et al.  High-frequency monolithic thin-film piezoelectric-on-substrate filters , 2009, International Journal of Microwave and Wireless Technologies.

[12]  T. Jamneala,et al.  Acoustic FBAR for filters, duplexers and front end modules , 2004, 2004 IEEE MTT-S International Microwave Symposium Digest (IEEE Cat. No.04CH37535).

[13]  Richard C. Ruby,et al.  A high performance 3.0 mm /spl times/3.0 mm /spl times/1.1 mm FBAR full band Tx filter for U.S. PCS handsets , 2002, 2002 IEEE Ultrasonics Symposium, 2002. Proceedings..

[14]  R. Abdolvand,et al.  Turnover Temperature Point in Extensional-Mode Highly Doped Silicon Microresonators , 2013, IEEE Transactions on Electron Devices.

[15]  C. D. White,et al.  Mechanically Coupled Contour Mode Piezoelectric Aluminum Nitride MEMS Filters , 2006, 19th IEEE International Conference on Micro Electro Mechanical Systems.

[16]  W. D. Beaver.  Theory and Design of the Monolithic Crystal Filter , 1967 .

[17]  Osamu Ikata,et al.  L and S band low-loss filters using SAW resonators , 1994, 1994 Proceedings of IEEE Ultrasonics Symposium.

[18]  Reza Abdolvand,et al.  In-plane acoustic reflectors for reducing effective anchor loss in lateral–extensional MEMS resonators , 2011 .

[20]  A. Pisano,et al.  Single-Chip Multiple-Frequency ALN MEMS Filters Based on Contour-Mode Piezoelectric Resonators , 2007, Journal of Microelectromechanical Systems.

[21]  K.M. Lakin,et al.  Bulk acoustic wave resonators and filters for applications above 2 GHz , 2002, 2002 IEEE MTT-S International Microwave Symposium Digest (Cat. No.02CH37278).

[22]  J. Larson,et al.  Ultra-miniature high-Q filters and duplexers using FBAR technology , 2001, 2001 IEEE International Solid-State Circuits Conference. Digest of Technical Papers. ISSCC (Cat. No.01CH37177).

[23]  Sheng-Shian Li,et al.  A Micromechanical Parallel-Class Disk-Array Filter , 2007, 2007 IEEE International Frequency Control Symposium Joint with the 21st European Frequency and Time Forum.

[24]  R. Reif,et al.  Measurements of the bulk, C-axis electromechanical coupling constant as a function of AlN film quality , 2000, IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control.

[25]  Cam Nguyen,et al.  Vibrating RF MEMS overview: applications to wireless communications , 2005, SPIE MOEMS-MEMS.