A kinetic model of pulsed sheaths

The ion distribution function is calculated as a function of time, self‐consistently with the electrostatic potential in two spatial coordinates for a pulsed sheath experiment. Such pulsed sheaths are used for a variety of purposes, including modification of material surfaces. The accuracy of the model is established by comparing the time varying ion density with experimental measurements. Additionally, the first reported prediction of the ion velocity distribution in this kind of pulsed sheath is given. This is important because the velocity distribution of the ions striking the surface determines how the surface material is modified.

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