论文信息 - Ultrasound-induced break-in method for an incoming polyvinyl acetal (PVA) brush used during post-CMP cleaning process - 字舞流文

Ultrasound-induced break-in method for an incoming polyvinyl acetal (PVA) brush used during post-CMP cleaning process

Jung-Hwan Lee | Jin-Goo Park | Nagendra Prasad Yerriboina | Heon-Yul Ryu | Tae-Gon Kim | Satomi Hamada | Hirokuni Hiyama | Y. Wada | Maneesh Kumar Poddar | Kwang-Min Han