3D structuring of multilayer suspended membranes including 2D photonic crystal structures
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Xavier Letartre | Pierre Viktorovitch | J. Mouette | Pedro Rojo-Romeo | C. Seassal | X. Letartre | P. Viktorovitch | J. Leclercq | C. Seassal | P. Rojo-Romeo | Jean-Louis Leclercq | J. Mouette
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