论文信息 - N/sub 2/O nitrided gate dielectric technology for 0.25 mu m CMOS - 字舞流文

N/sub 2/O nitrided gate dielectric technology for 0.25 mu m CMOS

H. Lifka | P. Woerlee | R. Woltjer | G. Paulzen | H. Pomp | A. Montree