Using the MEMSPEC-2000TM prototype test station, several micromachined structures have been characterized. The MEMSPEC-2000TM test station employs a laser based non- contact measurement technique to determine the 3D profile of the test structure. Vertical resolution of 0.1 micron and lateral resolution of approximately 1 micron can be achieved. The bandwidth of the sensor is DC to 100 kHz, allowing for time domain measurements of moving structures to be made. Standard static surface profiles have been measured for a number of varied types of test structures. The results of these measurements will be compared with design values. The time response of activated test structures will also be presented and compared to the theoretical predictions based upon modeling equations.