Overhead Hoist Transport Control System Design Using UML

As the semiconductor industrials change 200㎜-sized semiconductor wafer production process to 300㎜-sized one, it requires to develop the software for monitoring and simulating the robot which transfers a 300㎜-sized semiconductor wafer. Because such a software don`t run at standalone but communicate MCS(Material Control System) and Its subsystem a robot, its architecture is very complex. Therefore, in order to develop such a software systematically, we must utilize an object-oriented development methodology. UML. This paper presents an UML process application developing the software for monitoring and simulating the robot which transfers a semiconductor wafer on the production process.