Fundamental‐mode VHF/UHF minature acoustic resonators and filters on silicon

Novel bulk acoustic‐wave high‐Q resonators and acoustically coupled resonator filters have been fabricated and operated at their fundamental half‐wavelength mode in the 200‐500‐MHz frequency range. These structures are fabricated on thin ZnO/silicon diaphragms with dimensions small enough to be incorporated within integrated circuits. Resonator Q’s near 2600 at the fundamental mode have been obtained and strong inter‐resonator acoustic coupling has been achieved yielding filters having insertion loss (untuned) as low as 5.5 dB.