论文信息 - Dynamics and control of piezotube actuators for subnanometer precision applications

Dynamics and control of piezotube actuators for subnanometer precision applications

For the purpose of scanning probe microscope (SPM) design and control, the piezotube actuator dynamics were modeled as a simple forced bar/beam vibration with a mass attached at the end. Based on the model, a high speed and high precision displacement sensor (piezoelectric sensor) was proposed using an observer design. Experimental data are also shown to support the presented model.

K. Youcef-Toumi | T. Ohara

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