MEMS mirror module for programmable light system

An updated Programmable Light System (PLS) is demonstrated using a MEMS Mirror Module (MMM), allowing users to program the brightness and shape of a projected white light in a variety of dynamic solid-state lighting applications, e.g. in automotive dynamic headlights. The MMM is a new module which consists of a fast beam steering MEMS mirror with high optical laser power handling and a smart MEMS Driver with real time monitoring of the MEMS mirror for better system safety and mirror control. The PLS consists of the MMM, a multi-Watt 445-450nm laser source with beam shaping optics, a phosphor target, and projection optics to project a white light within the field of view of up to 60°. Devices such as the 1.2mm diameter A3I12.2 and 2.0mm diameter A7M20.1 aluminum coated mirror have been tested at >8W of CW power before seeing any damage to the device. The A7M20.1 MEMS mirror has been extensively tested (>100 hours) with 4W of CW power at room temperature with no physical damage. Same 4W operation, has also been successfully tested at elevated environmental temperature of 100°C during extended tests. PLS prototypes to date utilize only ~1W-2W laser diode sources, as limited by power of available laser diodes. The extended tests and thermal studies of the MMM however show that operation at up to 100°C with e.g. 4W CW power could be safely run for at least 10000 hours, even with MEMS mirrors with a simple aluminum coating (no protection or enhancement layers).

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