Design and fabrication of 2D Lorentz force actuated micromirrors

Lorentz force actuated micromirrors were designed and fabricated using standard silicon bulk and surface micromachining processes. First tests showed optical tilt angles up to 50 for driving currents of 0.25 mA using an external magnetic field of 1 T.

[1]  Freddie Shing-Hong Lin,et al.  An electromagnetic MEMS 2/spl times/2 fiber optic bypass switch , 1997, Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97).

[2]  Urban Simu,et al.  A Monolithic Piezoelectric Miniature Robot with 5 DOF , 2001 .