X-ray microscopy for NDE of micro- and nano-structrues (Invited Paper)

X-ray imaging offers a number of unique properties that are favorable for NDE applications, including large penetration depth, elemental specificity, and relatively low radiation damage. While direct-projection type x-ray systems with a few um resolution have been widely deployed, recent advances in x-ray optics and imaging methodology have lead to lens-based x-ray microscopes with better than 60-nm resolution, and with integrated 3D imaging and material analysis capabilities. Used independently or in combination with established techniques based on visible light and electron microscopy, these new high-resolution x-ray systems introduces many attractive new capabilities for studying structures at micrometer to tens-of-nm scale.