论文信息 - IR-study of a-SiCx:H and a-SiCxNy:H films for c-Si surface passivation - 字舞流文

IR-study of a-SiCx:H and a-SiCxNy:H films for c-Si surface passivation

C. Voz | R. Alcubilla | J. Puigdollers | M. Vetter | I. Martín | A. Orpella