RAMAN VIBRATIONAL STUDIES OF TRANSIENT ANNEALING OF GaAs AMORPHOUS THIN FILMS

A nanosecond pulsed ruby laser, a picosecond pulsed Nd-YAG laser and a set of halogen lamps are used to induce the reconstruction of the damage layer obtained by high dose ion implantation in single crystal GaAs. The lattice reconstruction by these different rapid irradiation sources has been examined by Raman scattering from the phonons.