Reduced propagation loss in silicon strip and slot waveguides coated by atomic layer deposition.
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W Freude | J Leuthold | A. Tervonen | L. Alloatti | R. Palmer | D. Korn | A. Säynätjoki | A Säynätjoki | T Alasaarela | A Tervonen | S Honkanen | T. Alasaarela | L Alloatti | D Korn | R Palmer | W. Freude | J. Leuthold | Seppo Honkanen
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