6D planar magnetic levitation system - PIMag 6D
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Christian Rudolf | Michael Katzschmann | Hans-Ulrich Mohr | Christopher Mock | Rainer Gloess | Christoph Schaeffel | Carolin Walenda
[1] J.J.H. Paulides,et al. (Semi-) analytical models for the design of high-precision permanent magnet actuators , 2009 .
[2] Johannes J. H. Paulides,et al. Design Considerations for Coreless Linear Actuators , 2013, IEEE Transactions on Magnetics.
[3] David L. Trumper,et al. High-precision magnetic levitation stage for photolithography , 1998 .
[4] Aah Ad Damen,et al. Comparison of error causes in commutation of magnetically levitated planar actuator with moving magnets , 2009 .