Fabrication of high-aspect-ratio polymer nanochannels using a novel Si nanoimprint mold and solvent-assisted sealing
暂无分享,去创建一个
Beomjoon Kim | Arum Han | Jaewon Park | Xing Cheng | Younghak Cho | Jaewon Park | A. Han | Hyun-Seo Park | Beomjoon Kim | Xing Cheng | Younghak Cho | Hyunsoo Park
[1] Juan J de Pablo,et al. A single-molecule barcoding system using nanoslits for DNA analysis , 2007, Proceedings of the National Academy of Sciences.
[2] Robert H. Austin,et al. Fabrication of 10 nm enclosed nanofluidic channels , 2002 .
[3] Ylva Bäcklund,et al. Precise mask alignment to the crystallographic orientation of silicon wafers using wet anisotropic etching , 1996 .
[4] T. Miyashita,et al. Fabrication of Depth-controllable Nanochannel with Polymer Nanoassembled Films Using Atomic Force Microscopy Lithography , 2005 .
[5] Robert Riehn,et al. Restriction mapping in nanofluidic devices. , 2005, Proceedings of the National Academy of Sciences of the United States of America.
[6] S. Chou,et al. Imprint Lithography with 25-Nanometer Resolution , 1996, Science.
[7] M. D. de Boer,et al. Fabrication of a silicon oxide stamp by edge lithography reinforced with silicon nitride for nanoimprint lithography , 2008 .
[8] Teodor Gotszalk,et al. Nano-width lines using lateral pattern definition technique for nanoimprint template fabrication , 2004 .
[9] Xiaogan Liang,et al. Single sub-20 nm wide, centimeter-long nanofluidic channel fabricated by novel nanoimprint mold fabrication and direct imprinting. , 2007, Nano letters.
[10] C. Chou,et al. Fabrication of Size-Controllable Nanofluidic Channels by Nanoimprinting and Its Application for DNA Stretching , 2004 .
[11] Yasukiyo Ueda,et al. The Lowest Surface Free Energy Based on −CF3 Alignment , 1999 .
[12] D. Nilsson,et al. Fabrication of silicon molds for polymer optics , 2003 .
[13] J. Giérak,et al. Focused Ion Beam Micro- and Nanoengineering , 2007 .
[14] A. L. Stevens,et al. A patterned anisotropic nanofluidic sieving structure for continuous-flow separation of DNA and proteins. , 2007, Nature nanotechnology.
[15] Pascal Silberzan,et al. From the Cover: The dynamics of genomic-length DNA molecules in 100-nm channels. , 2004, Proceedings of the National Academy of Sciences of the United States of America.
[16] Henri V. Jansen,et al. Institute of Physics Publishing Journal of Micromechanics and Microengineering Nano-ridge Fabrication by Local Oxidation of Silicon Edges with Silicon Nitride as a Mask , 2022 .
[17] Hanben Niu,et al. Manipulating DNA molecules in nanofluidic channels , 2006 .
[18] Christian H. Reccius,et al. Conformational analysis of single DNA molecules undergoing entropically induced motion in nanochannels. , 2006, Biophysical journal.
[19] Takehiko Kitamori,et al. Pressure-driven flow control system for nanofluidic chemical process. , 2006, Journal of chromatography. A.
[20] H. Craighead,et al. Separation of long DNA molecules in a microfabricated entropic trap array. , 2000, Science.
[21] H. Craighead. Future lab-on-a-chip technologies for interrogating individual molecules , 2006, Nature.
[22] N. Nguyen,et al. Nanofluidic devices and their applications. , 2008, Analytical chemistry.
[24] I. Rodríguez,et al. Isolated, sealed nanofluidic channels formed by combinatorial-mould nanoimprint lithography , 2006 .
[25] T. Fujii,et al. Fabrication of silicon dioxide submicron channels without nanolithography for single biomolecule detection , 2007, Nanotechnology.
[26] Qing Zhang,et al. High aspect ratio silicon nanomoulds for UV embossing fabricated by directional thermal oxidation using an oxidation mask , 2007 .
[27] Sealed three-dimensional nanochannels , 2005 .
[28] S. Kandlikar,et al. Review of fabrication of nanochannels for single phase liquid flow , 2006 .
[29] W. Yeo,et al. Nanostructured biosensing platform-shadow edge lithography for high-throughput nanofabrication. , 2009, Lab on a chip.