Optimization effect of annealing treatment on oxygen-implanted Nd:CNGG waveguides

Neodymium-doped calcium niobium gallium garnet (Nd:CNGG) waveguide operated at 632.8 nm is demonstrated by the 3.0-MeV oxygen-ion implantation with a fluence of 6.0 × 1014 ions/cm2. The annealing treatment at 300∘C for 45 min is carried out to optimize the waveguide quality. The dark-mode spectra are measured by the m-line technique. The refractive index profiles are calculated from the effective refractive indices of the waveguide modes. The near-field intensity distributions are simulated based on the reconstructed refractive index profiles. The annealing treatment process could effectively remove unwanted defects and optimize the waveguide quality. The optical properties of the annealed waveguide are better than that of the as-implanted waveguide.

[1]  Feng Chen,et al.  Micro‐ and submicrometric waveguiding structures in optical crystals produced by ion beams for photonic applications , 2012 .

[2]  Fernando Agulló-Rueda,et al.  Giant enhancement of material damage associated to electronic excitation during ion irradiation: The case of LiNbO3 , 2009 .

[3]  Feng Chen,et al.  Ion-implanted optical-stripe waveguides in neodymium-doped calcium barium niobate crystals. , 2009, Optics letters.

[4]  Feng Chen,et al.  Continuous wave laser generation at 1064 nm in femtosecond laser inscribed Nd:YVO4 channel waveguides , 2010 .

[5]  C. César,et al.  Planar waveguides by ion exchange in Er3+-doped tellurite glass , 2006 .

[6]  P. J. Chandler,et al.  Optical Effects of Ion Implantation , 1994 .

[7]  Markus Pollnau,et al.  Erbium‐doped integrated waveguide amplifiers and lasers , 2011 .

[8]  Jin-Hua Zhao,et al.  Property Studies of Optical Waveguide Formed by \keV He-Ion Implanted into a Nd:CNGG Crystal , 2009 .

[9]  R. Zheng,et al.  Planar waveguides in neodymium-doped calcium niobium gallium garnet crystals produced by proton implantation , 2016 .

[10]  Liangling Wang,et al.  Characterization of laser waveguides in Nd:CNGG crystals formed by low fluence carbon ion implantation , 2010 .

[11]  Alessandra Toncelli,et al.  Optical spectroscopy and diode-pumped laser performance of Nd/sup 3+/ in the CNGG crystal , 2001 .

[12]  P. J. Chandler,et al.  A New Approach to the Determination of Planar Waveguide Profiles by Means of a Non-stationary Mode Index Calculation , 1986 .

[13]  Feng Chen,et al.  Quasi-phase-matched frequency conversion in ridge waveguides fabricated by ion implantation and diamond dicing of MgO:LiNbO(3) crystals. , 2015, Optics express.

[14]  Alexander A. Sobol,et al.  Calcium niobium gallium and calcium lithium niobium gallium garnets doped with rare earth ions––effective laser media , 2002 .

[15]  R. Zheng,et al.  Planar waveguides in Yb3+-doped tellurite glasses fabricated by ion implantation of oxygen , 2015 .

[16]  Paolo Mazzoldi,et al.  Damage effects produced in the near-surface region of x-cut LiNbO3 by low dose, high energy implantation of nitrogen, oxygen, and fluorine ions , 2004 .

[17]  Feng Chen,et al.  Photonic guiding structures in lithium niobate crystals produced by energetic ion beams , 2009 .

[18]  Thermal annealing property of KOTiPO 4 planar and ridge waveguides formed by MeV Si ion implantation , 2013 .

[19]  Feng Chen,et al.  Femtosecond laser-written lithium niobate waveguide laser operating at 1085 nm , 2014 .

[20]  Feng Chen,et al.  Optical waveguides in crystalline dielectric materials produced by femtosecond‐laser micromachining , 2014 .

[21]  Haitao Guo,et al.  Fabrication and annealing optimization of oxygen-implanted Yb3+-doped phosphate glass planar waveguides , 2014 .

[22]  Feng Chen,et al.  Development of ion-implanted optical waveguides in optical materials: A review , 2007 .

[23]  Raimund Ricken,et al.  Low-loss ridge waveguides on lithium niobate fabricated by local diffusion doping with titanium , 2010 .

[24]  Ke Liu,et al.  Modeling and experiments of packaged Er3+-Yb3+ co-doped glass waveguide amplifiers , 2007 .