论文信息 - 193nm Lithography fabricated high sensitivity photonic crystal microcavity biosensors for plasma protein detection in patients with pancreatic cancer

193nm Lithography fabricated high sensitivity photonic crystal microcavity biosensors for plasma protein detection in patients with pancreatic cancer

High sensitivity L13-type two-dimensional photonic crystal microcavities with nanoholes were fabricated by 193nm photolithography. 0.03 picomolar concentration pancreatic cancer biomarker in patient serum samples was experimentally detected to 10× lower dilution than ELISA.

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