Self-calibration and algorithm of sample set of piezoresistive pressure sensors

Aiming at piezoresistive pressure sensors, this paper studies simulation of standard pressure by using benchmark current source and self-calibration of the sampling data characteristics. A data fusion algorithm for sample set is presented which transforms a surface problem into a curve fitting and interpolation problem. The simulation result shows that benchmark current source simulating pressure is successful and data fusion algorithm is effective. The maximum measurement error is only 0.098 kPa and maximum relative error is 0.92% at 0–45 kPa and −10–45°C.