论文信息 - A transfer-free wafer-scale CVD graphene fabrication process for MEMS/NEMS sensors - 字舞流文

A transfer-free wafer-scale CVD graphene fabrication process for MEMS/NEMS sensors

P. Sarro | T. Polichetti | B. Alfano | F. Ricciardella | S. Vollebregt | A. Giesbers | Y. Grachova | H. V. van Zeijl