Apparatus for inspecting a substrate

EBR / EEW inspection of the substrate, and automated integration substrate inspection device that can perform all of the defect inspection, and the error check of the reticle pattern is disclosed. The first image acquisition unit acquires a first image of the edge of the substrate, a first obtains a second image of the second image acquisition unit pattern of the substrate. The first image is obtained from the support substrate to the first stage, the second image is obtained from the support substrate to the second stage. Transfer robot transferring the substrate to the second stage from the first stage. An image processing section performs the EBR / EEW inspection of the substrate from the first image, from the second image and performing a defect inspection of the reticle error checking pattern. Performing an inspection process of a variety of substrates through the integrated substrate inspection device, as it improves the efficiency of the board inspection process, thereby improving the reliability of the various substrate inspection step.