Development of a miniature pressure transducer for biomedical applications
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[1] R. N. Thurston,et al. Erratum: Semiconducting Stress Transducers Utilizing the Transverse and Shear Piezoresistance Effects , 1961 .
[2] P. W. Chapman,et al. Silicon Diffused-Element Piezoresistive Diaphragms , 1962 .
[3] A. G. Milnes,et al. Piezoresistance of Diffused Layers in Cubic Semiconductors , 1963 .
[4] J. Wortman,et al. Young's Modulus, Shear Modulus, and Poisson's Ratio in Silicon and Germanium , 1965 .
[5] R. Finne,et al. A Water‐Amine‐Complexing Agent System for Etching Silicon , 1967 .
[6] G. Wallis,et al. Field Assisted Glass‐Metal Sealing , 1969 .
[7] K. Wise,et al. An IC piezoresistive pressure sensor for biomedical instrumentation. , 1973, IEEE transactions on bio-medical engineering.