A new silicon gas-flow sensor based on lift force
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Göran Stemme | E. Stemme | Edvard Kälvesten | Niklas Svedin | G. Stemme | E. Kaelvesten | E. Stemme | N. Svedin | Edvard Kälvesten
[1] M. A. Schmidt,et al. A liquid shear-stress sensor fabricated using wafer bonding technology , 1991, TRANSDUCERS '91: 1991 International Conference on Solid-State Sensors and Actuators. Digest of Technical Papers.
[2] Masayoshi Esashi,et al. Buried piezoresistive sensors by means of MeV ion implantation , 1994 .
[3] G. Stemme. A monolithic gas flow sensor with polyimide as thermal insulator , 1986, IEEE Transactions on Electron Devices.
[4] Henry Baltes,et al. Silicon gas flow sensors using industrial CMOS and bipolar IC technology , 1991 .
[5] William Bollay,et al. A Non-linear Wing Theory and its Application to Rectangular Wings of Small Aspect Ratio , 1939 .
[6] J. Anderson,et al. Fundamentals of Aerodynamics , 1984 .
[7] V. Gass,et al. Nanofluid handling by micro-flow-sensor based on drag force measurements , 1993, [1993] Proceedings IEEE Micro Electro Mechanical Systems.
[8] William Bollay. A Theory for Rectangular Wings of Small Aspect Ratio , 1937 .
[9] R. G. Johnson,et al. A highly sensitive silicon chip microtransducer for air flow and differential pressure sensing applications , 1987 .
[10] R. Howe,et al. Design and calibration of a microfabricated floating-element shear-stress sensor , 1988 .