论文信息 - Ion beam modification of structural and electrical properties of TiN thin films - 字舞流文

Ion beam modification of structural and electrical properties of TiN thin films

M. Mitrić | D. Peruško | I. Radović | B. Timotijevic | M. Milosavljević | M. Stojanović | M. Novaković | V. Milinović | M. Popović