An integrated acceleration sensor for traffic condition detection

An acceleration sensor used to determine the vehicles speeds on the highways is developed. The sensor is able to measure the vibrational accelerations perpendicular (out-of-plane) to the asphalt surface as low as 1 mG. The sensor structure is validated with the engineering software packages: ANSYS, COVENTOR and Matlab.

[1]  Y. Matsumoto,et al.  A Capacitive Accelerometer Using Sdb-soi Structure , 1995, Proceedings of the International Solid-State Sensors and Actuators Conference - TRANSDUCERS '95.

[2]  Junbo Wang,et al.  Z-axis differential silicon-on-insulator resonant accelerometer with high sensitivity , 2011 .

[3]  D. Kauzlarick,et al.  Fundamentals of microfabrication, the science of miniaturization, 2nd edition [Book Review] , 2003, IEEE Engineering in Medicine and Biology Magazine.

[4]  Sukhan Lee,et al.  Micromachined inertial sensors , 1999, Proceedings 1999 IEEE/RSJ International Conference on Intelligent Robots and Systems. Human and Environment Friendly Robots with High Intelligence and Emotional Quotients (Cat. No.99CH36289).

[5]  T. A. Roessig,et al.  Surface-micromachined resonant accelerometer , 1997, Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97).

[6]  Alberto Corigliano,et al.  A high sensitivity uniaxial resonant accelerometer , 2010, 2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS).

[7]  Sebastian Strache,et al.  Intelligent Road Infrastructure - A Concept Study , 2011 .

[8]  W. Fang,et al.  A novel soi Z-axis accelerometer with gap closing differential sensing electrodes , 2009, TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference.

[10]  Minhang Bao,et al.  Squeeze film air damping in MEMS , 2007 .

[11]  Farrokh Ayazi,et al.  Micromachined inertial sensors , 1998, Proc. IEEE.

[12]  Makoto Ishida,et al.  A capacitive accelerometer using SDB-SOI structure , 1996 .

[13]  H. Funabashi,et al.  A Z-axis differential capacitive SOI accelerometer with vertical comb electrodes , 2004, 17th IEEE International Conference on Micro Electro Mechanical Systems. Maastricht MEMS 2004 Technical Digest.

[14]  M. Gad-el-Hak.  The MEMS Handbook , 2001 .