论文信息 - Effects of deposition conditions on the ferroelectric properties of (Al1−xScx)N thin films - 字舞流文

Effects of deposition conditions on the ferroelectric properties of (Al1−xScx)N thin films

H. Funakubo | Yasuo Cho | Y. Hiranaga | Takao Shimizu | M. Akiyama | Shinnosuke Yasuoka | Akinori Tateyama | M. Uehara | Hiroshi Yamada