论文信息 - Silicon etch with chromium ions generated by a filtered or non-filtered cathodic arc discharge - 字舞流文

Silicon etch with chromium ions generated by a filtered or non-filtered cathodic arc discharge

M. Döbeli | A. Neels | A. Dommann | D. Scopece | D. Passerone | X. Maeder | U. Müller | J. Ramm | B. Widrig