论文信息 - Thin L-shaped spacers for CMOS devices - 字舞流文

Thin L-shaped spacers for CMOS devices

G. Mannaert | M. Jurczak | R. Rooyackers | I. Debusschere | E. Augendre | T. Chiarella | S. Beckx | C. Vrancken | E. Kunnen | M. de Potter de ten Broeck | V. Vassilev