Density measurements of thin germanium films by total reflection of X-rays

A double-crystal monochromator with the reflecting sample situated between both crystals was used to the determination of sample parameters by means of X-ray total reflection method. Theoretical discussion of the experimental arrangement was carried out and measurement performed on germanium single crystal proved the precision of the method. The densities of a-Ge films, prepared by standardly used technology of cathode sputtering, were on the average by 3.5% lower than the bulk density of germanium (5.35 g/cm3). The relative mean error of the density determination is less than 0.3%.