论文信息 - Optimization of the In Situ Biasing FIB Sample Preparation for Hafnia-Based Ferroelectric Capacitor - 字舞流文

Optimization of the In Situ Biasing FIB Sample Preparation for Hafnia-Based Ferroelectric Capacitor

Rong Huang | Zhaomeng Gao | Yiwei Wang | Yan Cheng | Yonghui Zheng | Qilan Zhong | Yunzhe Zheng | Tianjiao Xin | Hangbing Lyu