论文信息 - Variation of the complex refractive indices with Sb-addition in Ge-Sb-Te alloy and their wavelength dependence

Variation of the complex refractive indices with Sb-addition in Ge-Sb-Te alloy and their wavelength dependence

The complex refractive index of phase-change Ge2Sb2+xTe5 media fabricated by DC magnetron sputtering has been determined by using spectroscopic ellipsometry and atomic force microscopy. The composition of Ge2Sb2+xTe5 analyzed by Inductively Coupled Plasma/Atomic Emission Spectrometer and X-ray Fluorescence was in the range 0.08 less than or equal to x less than or equal to 0.58. The complex refractive index and the reflectivity have been verified nearly constant with Sb-addition at 780 nm, 650 nm, and 410 nm, respectively.

Sang Youl Kim | Sang J. Kim | Hun Seo | Myong R. Kim

[1] J.M. Bruneau,et al. Optical properties of phase change materials for optical recording , 1997, 1997 Optical Data Storage Topical Meeting ODS Conference Digest.

[2] Michiharu Abe,et al. Potentiality of the Ag–In–Sb–Te Phase Change Recording Material for High Density Erasable Optical Discs , 1997, Joint International Symposium on Optical Memory and Optical Data Storage.

[3] K. Vedam,et al. Simultaneous determination of refractive index, its dispersion and depth-profile of magnesium oxide thin film by spectroscopic ellipsometry. , 1989, Applied optics.

[4] Compact Disc Erasable (CD-E) with Ag–In–Sb–Te Phase-Change Recording Material , 1996 .