论文信息 - Variation of the complex refractive indices with Sb-addition in Ge-Sb-Te alloy and their wavelength dependence

Variation of the complex refractive indices with Sb-addition in Ge-Sb-Te alloy and their wavelength dependence

The complex refractive index of phase-change Ge2Sb2+xTe5 media fabricated by DC magnetron sputtering has been determined by using spectroscopic ellipsometry and atomic force microscopy. The composition of Ge2Sb2+xTe5 analyzed by Inductively Coupled Plasma/Atomic Emission Spectrometer and X-ray Fluorescence was in the range 0.08 less than or equal to x less than or equal to 0.58. The complex refractive index and the reflectivity have been verified nearly constant with Sb-addition at 780 nm, 650 nm, and 410 nm, respectively.

Sang Youl Kim | Sang J. Kim | Hun Seo | Myong R. Kim

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