Frontside micromachining using purous-silicon sacrificial-layer technologies
暂无分享,去创建一个
Gerhard Müller | F. Koch | G. Müller | T. Bischoff | W. Welser | W. Welser | F Koch | Th Bischoff
[1] P. Bordet,et al. On the origin of the porous silicon luminescence , 1995 .
[2] A. Halimaoui. Porous silicon: material processing, properties and applications , 1995 .
[3] Axel Richter,et al. Using porous silicon as a sacrificial layer , 1993 .
[4] Interpretation of the temperature dependence of the strong visible photoluminescence of porous silicon , 1995 .
[5] Jerome B. Sohn,et al. Photoassisted electrochemical micromachining of silicon in HF electrolytes , 1994 .
[6] Roger T. Howe,et al. Polysilicon Integrated Microsystems: Technologies And Applications , 1995, Proceedings of the International Solid-State Sensors and Actuators Conference - TRANSDUCERS '95.
[7] V. Lehmann. The physics of macroporous silicon formation , 1995 .