论文信息 - In-Chip Device-Layer Thermal Isolation of MEMS Resonator for Lower Power Budget - 字舞流文

In-Chip Device-Layer Thermal Isolation of MEMS Resonator for Lower Power Budget

Suhrid Bhat | T. Kenny | M. Hopcroft | R. Candler | S. Chandorkar | R. Melamud | M. Agarwal | C. Jha | Bongsang Kim | K. Park | Vijay Subramaniun