论文信息 - High-Performance porous MIM-type capacitive humidity sensor realized via inductive coupled plasma and reactive-Ion etching - 字舞流文

High-Performance porous MIM-type capacitive humidity sensor realized via inductive coupled plasma and reactive-Ion etching

Qun Wu | F. Meng | Nam-Young Kim | Guohui Yang | Jiahui Fu | Cong Wang | Jun-Ge Liang | T. Qiang | Mingqing Liu | K. K. Adhikari | Lei Wang | Yang-qiu Li | Yu-Ming Wu | Z. Yao | J. Fu