论文信息 - Ultra light-weight and high-resolution X-ray mirrors using DRIE and X-ray LIGA techniques for space X-ray telescopes - 字舞流文

Ultra light-weight and high-resolution X-ray mirrors using DRIE and X-ray LIGA techniques for space X-ray telescopes

Raul E. Riveros | Ryutaro Maeda | Hitomi Yamaguchi | Susumu Sugiyama | Yuichiro Ezoe | Ikuyuki Mitsuishi | Kazuhisa Mitsuda | Yoshiaki Kanamori | Kohei Morishita | Fumiki Kato | Takaya Ohashi | Noriko Y. Yamasaki | Utako Takagi | Masaki Koshiishi | Shinya Fujihira | F. Kato | R. Maeda | S. Sugiyama | K. Mitsuda | N. Yamasaki | T. Ohashi | Y. Ezoe | I. Mitsuishi | Y. Kanamori | H. Yamaguchi | R. Riveros | Kazuo Nakajima | K. Morishita | U. Takagi | K. Nakajima | M. Koshiishi | Shinya Fujihira

[1] Stefan Kraft,et al. Status of x-ray optics development for the XEUS Mission , 2004, SPIE Astronomical Telescopes + Instrumentation.

[2] Yoshitaka Ishisaki,et al. Micropore x-ray optics using anisotropic wet etching of (110) silicon wafers. , 2006, Applied optics.

[3] K. Suzuki,et al. High aspect ratio electrostatic micro actuators using LIGA process , 2000 .

[4] Chih-Kung Lee,et al. Etching submicrometer trenches by using the Bosch process and its application to the fabrication of antireflection structures , 2005 .

[5] Yuichiro Ezoe,et al. Mems open the way to ultra-lightweight and low-cost x-ray optics , 2006 .

[6] Raul E. Riveros,et al. Magnetic field assisted finishing of ultra-lightweight and high-resolution MEMS x-ray micro-pore optics , 2009, Optics + Optoelectronics.

[7] K. Mitsuda,et al. A Micromachined X-Ray Collector for Space Astronomy , 2007, TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference.

[8] Kazuo Nakajima,et al. Shaped silicon-crystal wafers obtained by plastic deformation and their application to silicon-crystal lenses , 2005 .

[9] K. Hane,et al. Development of a compact vacuum- and hydrogen-annealing machine for surface transformation of silicon and its applications to micro-optical devices , 2008 .

[10] Hiroshi Iwasaki,et al. Investigation of Shape Transformation of Silicon Trenches during Hydrogen Annealing , 2003 .

[11] Keith A. Nugent,et al. On the concentration, focusing, and collimation of x‐rays and neutrons using microchannel plates and configurations of holes , 1989 .

[12] R. Fujimoto,et al. DIOS: the Diffuse Intergalactic Oxygen Surveyor , 2006, SPIE Astronomical Telescopes + Instrumentation.

[13] R. Hudec,et al. Novel x-ray optics with Si wafers and formed glass , 2006, SPIE Astronomical Telescopes + Instrumentation.