论文信息 - Hand-Held Miniature Chemical Analysis System (μChemlab) for Detection of Trace Concentrations of Gas Phase Analytes - 字舞流文

Hand-Held Miniature Chemical Analysis System (μChemlab) for Detection of Trace Concentrations of Gas Phase Analytes

George R. Dulleck | P. R. Lewis | Carolyn M. Matzke | Darryl Y. Sasaki | G. R. Dulleck | D. Adkins | D. Sasaki | P. Lewis | R. Kottenstette | C. Matzke | E. Heller | G. Frye-Mason | C. Mowry | Greg Frye-Mason | Rich Kottenstette | Curt Mowry | Larry Anderson | Doug Adkins | Ed Heller | Ron Manginell | Dave Martinez | Larry Anderson | Ronald P. Manginell | Dave Martinez

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[4] R. J. Shul,et al. Microfabrication of membrane-based devices by deep-reactive ion etching (DRIE) of silicon , 1998 .