An All‐Solid‐State Flexible Micro‐supercapacitor on a Chip

Figure 1 . (a) A schematic image of fabrication process of PANI nanowire arrays based on MSC fl exible fi lm; (b) the optical picture of fl exible MSC unit arrays on PET fi lm; (c) optical microscopy of MSC 400; SEM image of PANI nanowire arrays obtained from (d) tilted 20 ° view and (e) top view. The current development trend of miniaturized autonomous electronic equipment such as implantable medical devices and active radio frequency identifi cation (RFID) tags has raised the demand for rechargeable microscale power sources of appropriate size. [ 1 , 2 ] Microscale energy storage units are especially important for integrating energy conversion devices (e.g., piezoelectric nanogenerator, [ 3 ] solar cell, [ 4 ] or thermalelectric cells [ 5 ] ) and other electronic circuits to build a self-powered micro/nano-device system. Furthermore, microscale and on-chip energy-storage devices can achieve high ratio of energy delivery at high charge-discharge rates due to a shortened diffusion length. [ 6 , 7 ]

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