论文信息 - Ni(Pt)-silicide contacts on CMOS devices: Impact of substrate nature and Pt concentration on the phase formation - 字舞流文

Ni(Pt)-silicide contacts on CMOS devices: Impact of substrate nature and Pt concentration on the phase formation

R. Pantel | M. Descoins | D. Mangelinck | C. Perrin | M. Juhel | M. Grégoire | K. Hoummada | F. Panciera | M. E. Kousseifi