论文信息 - Structure design of Si-based M-Z interference acceleration seismic geophone

Structure design of Si-based M-Z interference acceleration seismic geophone

A novel Si-based MOEMS acceleration seismic geophone, based on M-Z interferometry, is present in this paper. In one silicon chip, several elements including four silicon beams,seismic mass, a polarizer, M-Z waveguide interferometer and acousto-optic phase modulator are integrated. The working principle and the optimization structure design of the acceleration seismic geophone are given. The simulation result performed in FEM software ANSYS agrees with the theoretical analysis well. The main design parameters of the geophone system is as following: resonance frequency: 1353 Hz; phase detection sensitivity ΔΦ/a: 1.2×10-4rad/m/s2.

[1] Pierre Benech,et al. Interferometric displacement sensor made by integrated optics on glass , 1995 .

[2] Wu Bo. Integrated Optical Chips in a Michelson Interference Acceleration Seismic Geophone , 2003 .

[3] Guilan Ding,et al. Hybrid-integrated Michelson fiber optic accelerometer , 2004 .

[4] Guilan Ding,et al. Research and fabrication on integrated optical chip of hybrid-integrated optical acceleration seismic geophone , 2002, SPIE/COS Photonics Asia.

[5] Reinoud F. Wolffenbuttel,et al. Modeling the mechanical behavior of bulk-micromachined silicon accelerometers , 1998 .

[6] Y Cui,et al. Broadband Michelson fiber-optic accelerometer. , 1999, Applied optics.

[7] Guilan Ding,et al. MICHELSON FIBEROPTIC ACCELEROMETER , 1998 .

[8] Daniel Hofstetter,et al. Optical displacement measurement with GaAs/AlGaAs-based monolithically integrated Michelson interferometers , 1997 .