Novel VME pressure sensor

This paper presents the theoretical investigation, design, fabrication, package and experimental measurement of a novel vacuum microelectronic (VME) pressure sensor. A new configuration, named 'cathode-on-membrane', greatly reduces the difficulties in the package process and enables practical VME pressures sensors to be developed. Computer simulation and computer aided design have been used to theoretically investigate the properties of the sensor and to optimize its structure. Experimental studies and results are reported, for the first time, revealing the characteristics of the sensor output current varying with applied pressure under different anode voltages.